A 0.017 ∘/h Rate-Integrating Micro-Shell Resonator Gyroscope Using Virtual Rotation Modulation

Autor: Yu, Sheng, Sun, Jiangkun, Zhang, Yongmeng, Lu, Kun, Shi, Yan, Wu, Xuezhong, Xiao, Dingbang
Zdroj: Journal of Microelectromechanical Systems; December 2024, Vol. 33 Issue: 6 p657-659, 3p
Abstrakt: In this letter, a high-performance micro-shell resonator gyroscope (MSRG) working on rate-integrating mode with virtual rotation modulation (VRM) is presented for the first time. To suppress the angle-dependent bias and improve the long-term accuracy of MSRG, its vibrating pattern is virtually set to rotate forward and backward periodically, which is called virtual rotation modulation. Combined with the self-calibration for the virtual rotating rate and the aniso-damping, the RMS error of the device output under VRM is reduced. The experimental results show the MSRG with VRM can achieve a long-term bias instability (BI) of $0.017~^{\circ }$ /h, a wide measurement range of $\pm 1200~^{\circ }$ /s with the scale factor nonlinearity of 0.77 ppm, a bandwidth of 200 Hz and a resolution and threshold of $\lt 0.004~^{\circ }$ /s. [2024-0106]
Databáze: Supplemental Index