Optimization method of scanning strategy for reactive ion beam etching of large aperture grating elements
| Autor: | Wang, Xingjun, Zhang, Bo, Zhang, Longxiang, Chang, Xuran, Ma, Xunchang, Zhang, Cheng, Xiao, Wentong, Shi, Feng, Zhou, Gang, Peng, Xing |
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| Zdroj: | Proceedings of SPIE; October 2024, Vol. 13278 Issue: 1 p1327802-1327802-8 |
| Databáze: | Supplemental Index |
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