Electron beam deposited thin titanium films and its thermal oxidation to form rutile TiO2thin films

Autor: Saini, Arti, Barala, Sushil, Panda, Sri Aurobindo, Athira, C., Gangopadhyay, Subhashis
Zdroj: AIP Conference Proceedings Online; August 2024, Vol. 3149 Issue: 1 p020040-20044, 5p
Databáze: Supplemental Index