Optical and structural properties of silicon nitride thin films deposited by plasma enhanced chemical vapor deposition for high reflectance optical mirrors
| Autor: | Lequime, Michel, Ristau, Detlev, Saunders, Kirstin, Mazur, Michał, Clark, Caspar, Gibson, Des, Garcia Nuñez, Carlos |
|---|---|
| Zdroj: | Proceedings of SPIE; June 2024, Vol. 13020 Issue: 1 p130200T-130200T-12, 12889813p |
| Databáze: | Supplemental Index |
| Externí odkaz: |
|