Reliable post-production characterization approach to TiO2/SiO2electron-beam optical coatings based on multi-sample photometric and ellipsometric data

Autor: Lequime, Michel, Ristau, Detlev, Amochkina, Tatiana, Trubetskov, Michael, Janicki, Vesna, Sancho-Parramon, Jordi
Zdroj: Proceedings of SPIE; June 2024, Vol. 13020 Issue: 1 p130200S-130200S-8, 1171809p
Databáze: Supplemental Index