Nanoimprint post processing techniques to address edge placement error
| Autor: | Kojima, Yosuke, Tsuchiya, Go, Ogusu, Makoto, Ishida, Masaki, Tamura, Masahiro, Sakai, Keita, Ito, Toshiki, Ito, Yuto, Kawata, Isao, Kunugi, Hideki, Tamura, Shuhei, Asako, Ryuichi, Tanaka, Keisuke, Yamaji, Tomohito |
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| Zdroj: | Proceedings of SPIE; September 2023, Vol. 12915 Issue: 1 p1291506-1291506-10 |
| Databáze: | Supplemental Index |
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