Unique spectral interferometry solutions for complex high aspect ratio 3D NAND structures
| Autor: | Sendelbach, Matthew J., Schuch, Nivea G., Yoon, Jaesuk, Park, Jongmin, Shin, Minjung, Ihm, Dongchul, Bismuth, Oshrat, Ferber, Smadar, Ofek, Jacob, Turovets, Igor, Kim, Isaac |
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| Zdroj: | Proceedings of SPIE; April 2024, Vol. 12955 Issue: 1 p129551S-129551S-7, 1165967p |
| Databáze: | Supplemental Index |
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