Machine learning methods for voltage contrast yield analysis

Autor: Sendelbach, Matthew J., Schuch, Nivea G., Cerbu, D., Blanco Carballo, V. M., Schleicher, F., van de Kerkhove, J., Leray, P., Kissoon, N. N., De Poortere, E. P.
Zdroj: Proceedings of SPIE; April 2024, Vol. 12955 Issue: 1 p129551C-129551C-8, 1165968p
Databáze: Supplemental Index