Non-destructive measurement of bottom width in deep trench isolation structures using IRCD metrology
| Autor: | Sendelbach, Matthew J., Schuch, Nivea G., Keller, Nick, Poulingue, Marc, Grynko, Ross, Ribaudo, Troy, Antonelli, G. Andrew, Li, Victor, Ravasio, Marcello, Le Cunff, Delphine |
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| Zdroj: | Proceedings of SPIE; April 2024, Vol. 12955 Issue: 1 p1295514-1295514-13 |
| Databáze: | Supplemental Index |
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