Feature grouping to enable edge placement error-aware process control in multi-feature logic use case
| Autor: | Sendelbach, Matthew J., Schuch, Nivea G., Schelcher, Guillaume, Athayde, Marsil, Schoofs, Stijn, Hsia, Jeff, Khalik, Zuan, Li, Fahong, Nechaev, Konstantin, Sahraeian, Reza, Tamaddon, Amir-Hossein, Blanco, Victor, van der Sanden, Stefan, Zhang, Yichen, Anunciado, Roy, Dillen, Harm, Leray, Philippe |
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| Zdroj: | Proceedings of SPIE; April 2024, Vol. 12955 Issue: 1 p129550O-129550O-11, 12825462p |
| Databáze: | Supplemental Index |
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