Life cycle assessment of etching processes for FDSOI transistors technologies
| Autor: | Mohanty, Nihar, Altamirano-Sánchez, Efrain, Renaud, Mickaël, Sarrazin, Aurélien, Lopes-Barbosa, Joao, Rivoira, Yannick, Servin, Isabelle, Boulard, François |
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| Zdroj: | Proceedings of SPIE; April 2024, Vol. 12958 Issue: 1 p129580K-129580K-11, 12828432p |
| Databáze: | Supplemental Index |
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