Performance comparison of photosensitive polyimides for high-resolution dual-damascene schemes for FOWLP packaging applications
| Autor: | Guerrero, Douglas, Amblard, Gilles R., Bozano, Luisa, Quon, Roger, Briggs, Ben, Ley, Ryan, Pang, Athena, Suo, Peng, Lianto, Prayudi, Yong, Andy, Sundarrajan, Arvind, Fernandez, Jorge, Khasgiwale, Niranjan, Chuang, C. C., Chen, Jang Fung, Krishnan, Siddarth, Chudzik, Mike, Bencher, Chris |
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| Zdroj: | Proceedings of SPIE; April 2024, Vol. 12957 Issue: 1 p129570X-129570X-6, 1166137p |
| Databáze: | Supplemental Index |
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