Indium nitrate hydrate resist characteristics evaluated by low-energy electron beam exposure
| Autor: | Guerrero, Douglas, Amblard, Gilles R., Valdez, Marisol, Joshi-Imre, Alexandra, Bonner, Justin C., Preimesberger, Leigh Z., Grayson, Jesse L., Hsu, Julia W. P. |
|---|---|
| Zdroj: | Proceedings of SPIE; April 2024, Vol. 12957 Issue: 1 p129570Q-129570Q-10, 12827441p |
| Databáze: | Supplemental Index |
| Externí odkaz: |
|