Thin film thickness analysis based on a deep learning algorithm using data augmentation
| Autor: | Sendelbach, Matthew J., Schuch, Nivea G., Lee, Joonyoung, Jin, Jonghan |
|---|---|
| Zdroj: | Proceedings of SPIE; April 2024, Vol. 12955 Issue: 1 p129552G-129552G-6, 1165975p |
| Databáze: | Supplemental Index |
| Externí odkaz: |
|