Leveraging x-ray scatterometry and machine learning to enable robust and high-throughput optical critical dimension metrology for advanced 3D flash memory contact hole profile
| Autor: | Sendelbach, Matthew J., Schuch, Nivea G., Chouaib, Houssam, Shi, Teng, Chou, Anderson, Kawanami, Shinya, Takahara, Masatomo, Luo, Yeunchian, Leiyin, Zhijie, Zeng, Bin, Shaughnessy, Derrick, Tan, Zhengquan, Sasaki, Kaori, Momotori, Naoki |
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| Zdroj: | Proceedings of SPIE; April 2024, Vol. 12955 Issue: 1 p129553F-129553F-8, 1165986p |
| Databáze: | Supplemental Index |
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