Global tilt extraction for BEOL contact landing displacement control
| Autor: | Sendelbach, Matthew J., Schuch, Nivea G., Lin, Yung-Yi, Lee, Tien-Jung, Su, Hsiao-Fei, Liu, Yen-Hung, Cheng, Chao-Yu, Liman, Christopher, Chen, Boxue, Tan, Zhengquan, Chiu, Yuan-Chieh, Huang, Chiung-Kun, Liang, Ying-Hung, Lee, Hong-Ji, Lian, Nan-Tzu |
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| Zdroj: | Proceedings of SPIE; April 2024, Vol. 12955 Issue: 1 p1295532-1295532-8 |
| Databáze: | Supplemental Index |
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