Pattern-based in-design fixing for improving design for manufacturability (DFM) rule compliance
| Autor: | Lafferty, Neal V., Grunes, Harsha, Wang, Lynn T. N., Reyes Ruiz, Ariel de Jesus, Nicolae, Teodora, Tanev, Ivan, Johnsen, Klaus-Peter, Villarreal, David, Batarseh, Fadi |
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| Zdroj: | Proceedings of SPIE; April 2024, Vol. 12954 Issue: 1 p1295410-1295410-11 |
| Databáze: | Supplemental Index |
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