A new era DFM solution for yield enhancement using machine learning (ML)
| Autor: | Lafferty, Neal V., Grunes, Harsha, Kim, Namjae, Kang, Jae-Hyun, Jung, SangWoo, Jang, DaeHyun, Kim, ByungMoo, Jeon, JoongWon, Ku, Ja-Hum, Madkour, Kareem, Kwan, Joe |
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| Zdroj: | Proceedings of SPIE; April 2024, Vol. 12954 Issue: 1 p1295411-1295411-11 |
| Databáze: | Supplemental Index |
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