Towards efficient and accurate cost functions for EUVL stochastic-aware OPC correction and verification: via failure probability versus image and process variation band metrics
| Autor: | Burkhardt, Martin, van Lare, Claire, Wang, Shuling, Latypov, Azat, Shang, Shumay, Fenger, Germain, Wei, Chih-I, Zhang, Xima |
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| Zdroj: | Proceedings of SPIE; April 2024, Vol. 12953 Issue: 1 p1295319-1295319-6 |
| Databáze: | Supplemental Index |
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