EUV optics at ZEISS: status, outlook, and future
| Autor: | Burkhardt, Martin, van Lare, Claire, Kalden, Joachim, Neumann, Jens Timo, Jürgens, Dirk, Gräupner, Paul, Seitz, Wolfgang, Kürz, Peter |
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| Zdroj: | Proceedings of SPIE; April 2024, Vol. 12953 Issue: 1 p129530Q-129530Q-6, 1165777p |
| Databáze: | Supplemental Index |
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