Particle mobilization by EUV-induced plasma and fast electrons
| Autor: | Burkhardt, Martin, van Lare, Claire, van de Kerkhof, Mark, Shefer, Dmitry, Nikipelov, Andrey, Sbrizzai, Fabio, Kvon, Vladimir, Bouwmans, Sim, Beckers, Job, Banine, Vadim |
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| Zdroj: | Proceedings of SPIE; April 2024, Vol. 12953 Issue: 1 p129530E-129530E-9, 1165780p |
| Databáze: | Supplemental Index |
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