EUV source pole control for LCDU and CD ellipticity handling in hexagonal contact arrays
| Autor: | Burkhardt, Martin, van Lare, Claire, Song, Jieun, Kim, Janghun, Bae, Hyung Jong, Kim, Sudeok, Ha, Soonmok, Jung, Woojin, Cho, Seokwon, Park, Jeounghun, Park, Dohyeon, Lee, Eunji, Song, Minseung, Ha, Hyunseung, Han, Giseon, Choi, Young Joo, Park, Gyeongseok, Shim, Seongbo, Hwang, Chan |
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| Zdroj: | Proceedings of SPIE; April 2024, Vol. 12953 Issue: 1 p1295309-1295309-6 |
| Databáze: | Supplemental Index |
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