Straightforward method for sidewall roughness measurements by AFM on ion beam etched slanted diffraction gratings and their topography development
| Autor: | Argaman, Naamah, Hua, Hong, Nikolov, Daniel K., Lima, Paulo, Pochon, Sebastien, Pearson, David, Cho, Sung-Jin |
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| Zdroj: | Proceedings of SPIE; March 2024, Vol. 12913 Issue: 1 p129131A-129131A-10, 12783980p |
| Databáze: | Supplemental Index |
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