Design and fabrication of an electrothermally actuated 2D scanning micromirror
| Autor: | Zappe, Hans, Piyawattanametha, Wibool, Park, Yong-Hwa, Nambiar, Sreeraj P., Thomas, Susan, Bhattacharya, Shanti, Bhattacharya, Enakshi |
|---|---|
| Zdroj: | Proceedings of SPIE; March 2024, Vol. 12899 Issue: 1 p128990P-128990P-3, 1160914p |
| Databáze: | Supplemental Index |
| Externí odkaz: |
|