| Autor: |
Dai, Zhongbin, Cheng, Hengxiao, Xiao, Siqi, Sun, Haiding, Zuo, Chengjie |
| Zdroj: |
IEEE Electron Device Letters; 2024, Vol. 45 Issue: 4 p720-723, 4p |
| Abstrakt: |
In this work, a coupled shear mode surface acoustic wave (CS-SAW) resonator has been proposed and demonstrated for the first time, which utilizes both ${e}_{{16}}$ and ${e}_{{34}}$ for piezoelectric excitation and achieves exceedingly high electromechanical coupling coefficient ( ${k}^{{2}}{)}$ of 34% at 5 GHz based on a LiNbO3-on-SiC (LNoSiC) substrate. By properly selecting the three-dimensional (3D) Euler angle ( $\alpha {)}$ and designing the thickness ( ${h}_{\text {LN}}{)}$ to wavelength ( $\lambda {)}$ ratio of the LiNbO3 thin film, two piezoelectric coefficients ( ${e}_{{16}}$ and ${e}_{{34}}{)}$ can be coherently coupled together in one single vibration pattern, so that the electromechanical coupling ${k}^{{2}}$ add up. When the Euler angle approaches 0°, the CS-SAW resonator operating at 5 GHz exhibits a high ${k}^{{2}}$ of 34% and an excellent figure of merit (FoM = ${k}^{{2}} \cdot ~{Q}_{\text {max}}{)}$ of 221, which are both the highest among all reported high frequency SAW resonators near or above 5 GHz. This demonstration not only greatly enhances the bandwidth of SAW filters at high frequencies, but also opens up a groundbreaking way of designing new and more complex coupled modes for a variety of applications. |
| Databáze: |
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