| Autor: |
Lohe, C., Kohl, C.D. |
| Zdroj: |
Thin Solid Films; July 1989, Vol. 174 Issue: 1 p75-78, 4p |
| Abstrakt: |
The reaction of arsine in a gas source with a tungsten filament (WGS) was studied. A carefully tuned and checked mass spectrometer was used to obtain quantitative data. Maximum As2and As4production was observed at 800 °C and 630 °C respectively. This WGS was compared with a second gas source equipped with a tantalum wire. Operating conditions which yielded predominantly arsenic dimers were only achieved with the WGS. An explanation of the different yields in terms of the catalytic behaviour of the transition metals is proposed. |
| Databáze: |
Supplemental Index |
| Externí odkaz: |
|
