Improvement of microtubule defects of SiC substrate through a thermal effect control method
| Autor: | Lu, Yuan, Fu, Yabo, Shen, Xiaoyu, Li, Jiawei, Yeh, Kuowei, Xue, Yanpeng, Ozoemena, Kenneth Ikechukwu, Gluche, Peter, Chang, Chung Chieh, Zhu, Boang |
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| Zdroj: | Proceedings of SPIE; February 2024, Vol. 13068 Issue: 1 p130680T-130680T-4, 1176125p |
| Databáze: | Supplemental Index |
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