Influence of absorption distribution in Mo/Si multilayers on 13.5 nm femtosecond laser damage morphologies
| Autor: | Shao, Jianda, Yoneda, Hitoki, Li, Jiahao, Peng, Yunqi, Zhao, Yuanan, Zhu, Xiangyu, Ke, Ligong, Zhao, Jiaoling, Zhang, Ge, Shuai, Kun, Liu, Xuyi, Xia, Zhilin, Shao, Jianda |
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| Zdroj: | Proceedings of SPIE; December 2023, Vol. 12982 Issue: 1 p129820U-129820U-5, 1168386p |
| Databáze: | Supplemental Index |
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