Thermochemical laser writing of chromium grayscale masks and their application for fabrication of multilevel diffractive optical elements
| Autor: | Zhou, Changhe, Poon, Ting-Chung, Cao, Liangcai, Yoshikawa, Hiroshi, Kuts, Roman I., Korolkov, Victor P., Sametov, Alexander R., Cherkashin, Vadim V., Zaitseva, Daria E., Golubtsov, Sergey K. |
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| Zdroj: | Proceedings of SPIE; November 2023, Vol. 12768 Issue: 1 p1276829-1276829-8 |
| Databáze: | Supplemental Index |
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