PEC-aware MPC for CD quality improvement
| Autor: | Liang, Ted, Kim, Seong-Sue, Shin, Soeun, Lee, Boram, Lee, Sukho, Kim, Eok bong, Kim, Mina, Choi, Jin, Lee, Sanghee, Sato, Yutaro, Syukri, Ahmad, Ono, Itaru, Torigoe, Yohei |
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| Zdroj: | Proceedings of SPIE; November 2023, Vol. 12751 Issue: 1 p127510V-127510V-6, 1147597p |
| Databáze: | Supplemental Index |
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