Efficient patterning approaches for non-Manhattan layouts by using variable shaped beam systems
| Autor: | Liang, Ted, Kim, Seong-Sue, Stolberg, Ines, Linn, Eike, Weidenmueller, Ulf, Slodowski, Matthias |
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| Zdroj: | Proceedings of SPIE; November 2023, Vol. 12751 Issue: 1 p127510K-127510K-3, 1147594p |
| Databáze: | Supplemental Index |
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