Establishing a nanoimprint lithography ecosystem
| Autor: | Liang, Ted, Kim, Seong-Sue, Tanaka, Hideo, Maruyama, Naoki, Hiura, Mitsuru, Suzaki, Yoshio, Kimura, Atsushi, Yamamoto, Kiyohito, Matsumoto, Takahiro, Yamamoto, Kenji, Takabayashi, Yukio |
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| Zdroj: | Proceedings of SPIE; November 2023, Vol. 12751 Issue: 1 p127510D-127510D-11, 12623502p |
| Databáze: | Supplemental Index |
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