Status and outlook of EUV optics at ZEISS
| Autor: | Naulleau, Patrick P., Gargini, Paolo A., Itani, Toshiro, Ronse, Kurt G., Zimmermann, Jörg, Neumann, Jens Timo, Jürgens, Dirk, Gräupner, Paul |
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| Zdroj: | Proceedings of SPIE; November 2023, Vol. 12750 Issue: 1 p127500O-127500O-6, 1147507p |
| Databáze: | Supplemental Index |
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