Advanced development for contact-holes of metal-oxide resists
| Autor: | Naulleau, Patrick P., Gargini, Paolo A., Itani, Toshiro, Ronse, Kurt G., Dinh, Cong Que, Nagahara, Seiji, Kato, Kanzo, Kawakami, Shinichiro, Kuwahara, Yuhei, Okada, Soichiro, Cho, Kayoko, Tomori, Hikari, Nakamura, Junji, Terada, Shoichi, Muramatsu, Makoto, Krawicz, Alexandra, McInerney, Kathleen, Antonovich, Nathan, Huli, Lior |
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| Zdroj: | Proceedings of SPIE; November 2023, Vol. 12750 Issue: 1 p1275009-1275009-13 |
| Databáze: | Supplemental Index |
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