Electron beam-generated plasmas in NF3environments for the passivation of UV/O/IR mirrors
| Autor: | Barto, Allison A., Keller, Fanny, Stahl, H. Philip, Rodriguez de Marcos, L. V., Boris, D. R., Wheeler, V. D., Batkis, M. F., Del Hoyo, J. G., Jin, E. N., Walton, S. G., Wollack, E. J., Quijada, M. A. |
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| Zdroj: | Proceedings of SPIE; October 2023, Vol. 12676 Issue: 1 p126760F-126760F-11, 12549252p |
| Databáze: | Supplemental Index |
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