Investigation on the lithographic process of a high-precision direct laser writing system
| Autor: | Panchapakesan, Balaji, Attias, André-Jean, Park, Wounjhang, Häcker, Annika-Verena, Stauffenberg, Jaqueline, Manske, Eberhard |
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| Zdroj: | Proceedings of SPIE; October 2023, Vol. 12653 Issue: 1 p126530A-126530A-7, 1138778p |
| Databáze: | Supplemental Index |
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