Spatially resolved scattering metrology to quantify losses induced by contamination and defects
| Autor: | Minoglou, Kyriaki, Karafolas, Nikos, Cugny, Bruno, Bolliand, A., Zerrad, M., Lequime, M., Amra, C. |
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| Zdroj: | Proceedings of SPIE; September 2023, Vol. 12777 Issue: 1 p127776I-127776I-14, 12649839p |
| Databáze: | Supplemental Index |
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