Multilevel mask design and modelling of micro optical elements and flat optics with arbitrary optical functions
| Autor: | Aikens, David M., Rehn, Henning, Thibault, Simon, Uhlendorf, Kristina, Cunha, J., Aguiam, Diogo E. |
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| Zdroj: | Proceedings of SPIE; September 2023, Vol. 12798 Issue: 1 p127982Y-127982Y-5, 1151844p |
| Databáze: | Supplemental Index |
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