Microscopic to macroscopic modelling of optical defect inspection system
| Autor: | Bodermann, Bernd, Frenner, Karsten, Barnes, Bryan M., Chen, Yi-Hao, Zhang, Ling, Cheng, Han-Hsiang, Gomez, Federico Doque, Gely, Sandra |
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| Zdroj: | Proceedings of SPIE; August 2023, Vol. 12619 Issue: 1 p126190T-126190T-6, 1135717p |
| Databáze: | Supplemental Index |
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