Non-integral model-based scatterometry for single-structure OCD metrology
| Autor: | Bodermann, Bernd, Frenner, Karsten, Barnes, Bryan M., Chein, Wei-Hsin, Yang, Fu-Sheng, Fu, Zi-Ying, Chen, Liang-Chia |
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| Zdroj: | Proceedings of SPIE; August 2023, Vol. 12619 Issue: 1 p126190H-126190H-9, 1135720p |
| Databáze: | Supplemental Index |
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