Construction of a time-domain full-field OCT for non-contact volumetric layer thickness measurement

Autor: Lehmann, Peter, Osten, Wolfgang, Albertazzi Gonçalves, Armando, Bulun, Georgis, Lotz, Marvin, Keksel, Andrej, Stelzer, Gerhard, Seewig, Jörg
Zdroj: Proceedings of SPIE; August 2023, Vol. 12618 Issue: 1 p126180S-126180S-8, 1135629p
Databáze: Supplemental Index