Investigation of Zn-diffusion in 2-micron InGaAs/GaAsSb superlattice planar diodes using atomic layer deposition of ZnO
Autor: | Fulop, Gabor F., Ting, David Z., Zheng, Lucy L., Muduli, Manisha, Schwartz, Mariah, Gajowski, Nathan, Lee, Seunghyun, Krishna, Sanjay |
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Zdroj: | Proceedings of SPIE; June 2023, Vol. 12534 Issue: 1 p125340A-125340A-6, 1128067p |
Databáze: | Supplemental Index |
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