Meso-scale energy harvester: a comparison between MEMS and micromachined designs

Autor: Yang, Jinkyu, Huang, Guoliang, Nouh, Mostafa A., Shahab, Shima, Tol, Serife, Miron, Guilherme C., Braga, Danilo, Cordioli, Julio A.
Zdroj: Proceedings of SPIE; April 2023, Vol. 12483 Issue: 1 p124831O-124831O-12, 12358282p
Databáze: Supplemental Index