The damage control of sub layer while ion-driven etching with vertical carbon profile implemented
| Autor: | Mohanty, Nihar, Altamirano-Sánchez, Efrain, Mun, SeungJin, Yoo, Lina, Hong, Jongdeok, Ahn, Junyeong, Jeon, Kyung-yub, Bai, Keunhee |
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| Zdroj: | Proceedings of SPIE; May 2023, Vol. 12499 Issue: 1 p124990J-124990J-5, 1124916p |
| Databáze: | Supplemental Index |
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