Characterization of TSV etch from a sustainability standpoint
| Autor: | Mohanty, Nihar, Altamirano-Sánchez, Efrain, Isowamwen, Osakpolo, Marchack, Nathan, Koty, Devi, Yang, Qingyun, Nguyen, Hien, Molis, Steve, Lefevre, Scott, Hopstaken, Marco, Metz, Andy, Shearer, Jeff, Bruce, Robert L. |
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| Zdroj: | Proceedings of SPIE; May 2023, Vol. 12499 Issue: 1 p124990H-124990H-8, 1124919p |
| Databáze: | Supplemental Index |
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