Large field of view metrology: detecting critical edge placement error signatures not seen with small field of view in an HVM environment

Autor: Robinson, John C., Sendelbach, Matthew J., Ridane, Mohamed, Chen, Ivy, Song, Jaden, Nikolsky, Peter, Chen, Kuan-Ming, Lee, Shinyeong, Park, Sean, Lin, Kolos, Su, Yu-Chi, Cho, Kyoyeon, Yu, Ethan, Park, James, Elmalk, Abdalmohsen, Hsieh, Chih-Hung, Serebryakov, Alexander, Zhang, Lei, Jee, Taekwon, You, Joonsang, Lee, Hong-Goo, Park, Jongmin, Kim, Jungchan, Kim, Sang-Woo, Hong, Seungmo, Seo, Jaewook
Zdroj: Proceedings of SPIE; April 2023, Vol. 12496 Issue: 1 p124963C-124963C-7, 1124675p
Databáze: Supplemental Index