New metrology technique for measuring the free shape of a patterned 300mm wafer held vertically
| Autor: | Robinson, John C., Sendelbach, Matthew J., Trujillo-Sevilla, Juan M., Casanova-González, Óscar, Roqué-Velasco, Alex, Jesús Sicilia, Miguel, Ramos-Rodríguez, Jose Manuel, Gaudestad, Jan O. |
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| Zdroj: | Proceedings of SPIE; April 2023, Vol. 12496 Issue: 1 p124963G-124963G-7, 1124675p |
| Databáze: | Supplemental Index |
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