Pushing the boundaries of EUV scatterometry: reconstruction of complex nanostructures for next-generation transistor technology
| Autor: | Robinson, John C., Sendelbach, Matthew J., Ciesielski, Richard, Lohr, Leonhard M., Mertens, Hans, Charley, Anne-Laure, de Ruyter, Rudi, Bogdanowicz, Janusz, Hönicke, Philipp, Abbasirad, Najmeh, Soltwisch, Victor |
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| Zdroj: | Proceedings of SPIE; April 2023, Vol. 12496 Issue: 1 p124961M-124961M-9, 1124659p |
| Databáze: | Supplemental Index |
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