Edge detection using deep learning pipelines for TEM and SEM metrology by proposing generic and specific approaches
| Autor: | Robinson, John C., Sendelbach, Matthew J., Loza, Edgar, Baderot, Julien, Grould, Marion, Pery, Emilie, Chausse, Frédéric, Martinez, Sergio, Foucher, Johann |
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| Zdroj: | Proceedings of SPIE; April 2023, Vol. 12496 Issue: 1 p124962P-124962P-14, 12371253p |
| Databáze: | Supplemental Index |
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