Wide-field massive CD metrology based on the imaging Mueller-matrix ellipsometry for semiconductor devices

Autor: Robinson, John C., Sendelbach, Matthew J., Oh, Juntaek, Son, Jaehyeon, Hwang, Eunsoo, Ahn, Jinwoo, Lee, Jaewon, Oh, Byungkwan, Lee, Donggun, Lim, Seunga, Kang, Kihun, Im, Sangil, Jeong, Jibin, Yun, Taehyun, Lee, Jinsoo, Yoon, Changhyeong, Cho, Hyukjoon, Kim, Gangbu, Kang, Byeongki, Moon, Hankyoul, Hwang, Jong-hyun, Park, Youngkyu, Kim, Taejoong, Lee, Suyoung, Yang, Yusin, Lee, Myungjun
Zdroj: Proceedings of SPIE; April 2023, Vol. 12496 Issue: 1 p124962X-124962X-7, 1124666p
Databáze: Supplemental Index